• 6,000 square feet (2,500 square feet clean space)

• Class-100 and class-1000 clean room bays

• More than 20 pieces of equipment for fabrication and characterization

• Processes supported; lithography, thermal processing, deposition, and etching

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Photos of Equipment

Kurt J. Lester (2ea.) depositors

Sublimation depositor - elemental

Karl Suss MJB-3 mask aligner

Thermtec oxidation furnace (1200C)

Lindberg diffusion tube furnace (900C)

Wetbench - Solvents

Wetbench - Acids

Wetbench - Photoesist

High - Temp Stage (1500 C)

Bruker Advance D8 X-ray Diffractometer

Specialty Coating Systems G3P - 8 Spinner

Oxford Plasmalab 80+ RIE

Zyvex S100 Nanomanipulator

Hitachi S - 4800 - II SEM with EBSD/OIM

Gatan PECS Ion Polisher/Depositor

KLATencor AlphaStep Profilometer

Leica optical - digital microscope

Filmetrics F20 Interferometer

Micromanipulator probe station

Varian Cary 5000 175-3300 nm photospectrometer

MBR Electronics USS9200 Ultrasonic colder system

Stanford Research Lock-in Amp

PV Measurements Inc IV tester

Ecopia Hall-Effect measurement

Karl Zeiss optical microscope